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1

Characterization method for new resist formulations for HAR patterns made by X-ray lithography

Kunka, Danays, Mohr, Jürgen, Nazmov, Vladimir, Meiser, Jan, Meyer, Pascal, Amberger, Maximilian, Koch, Frieder, Schulz, Joachim, Walter, Marco, Duttenhofer, Thomas, Voigt, Anja, Ahrens, Gisela, Grützn

Journal:

Microsystem Technologies

Année:

2014

Langue:

english

Fichier:

PDF, 795 KB

english, 2014

2

Soft X-ray lithography of high aspect ratio SU8 submicron structures

Elena Reznikova, Juergen Mohr, Martin Boerner, Vladimir Nazmov, Peter-Juergen Jakobs

Journal:

Microsystem Technologies

Année:

2008

Langue:

english

Fichier:

PDF, 444 KB

english, 2008

3

Gebündeltes Röntgenlicht: Planare refraktive Röntgenlinsen

Arndt Last, Vladimir Nazmov, Elena Reznikova

Journal:

Physik in unserer Zeit

Année:

2007

Langue:

german

Fichier:

PDF, 1.01 MB

german, 2007

4

SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Crystals, Multilayers, and Other Synchrotron Optics - Focusing properties of x-ray polymer refractive lenses from SU-8 resist layer

Snigirev, Anatoly A., Snigireva, Irina, Drakopoulos, Michael, Nazmov, Vladimir, Reznikova, Elena, Kuznetsov, Sergey, Grigoriev, Maxim, Mohr, Jurgen, Saile, Volker, Ishikawa, Tetsuya, Macrander, Albert

Année:

2003

Langue:

english

Fichier:

PDF, 378 KB

english, 2003

5

SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Emerging Lithographic Technologies III - Regular microfilters based on PTFE

Nazmov, Vladimir, Pindyurin, Valery F., Mezentseva, Lubov A., Mchedlishvili, B. V., Vilensky, Alexander I., Vladimirsky, Yuli

Année:

1999

Langue:

english

Fichier:

PDF, 1.08 MB

english, 1999

6

SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Emerging Lithographic Technologies IV - Direct creation of microstuctures in fluorine-containing polymers

Nazmov, Vladimir, Pindyurin, Valery F., Mezentseva, Lubov A., Mchedlishvili, B. V., Vilensky, Alexander I., Shirkova, V. V., Istomin, V. E., Dobisz, Elizabeth A.

Année:

2000

Langue:

english

Fichier:

PDF, 621 KB

english, 2000

7

SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Microlithography - Santa Clara, CA (Sunday 10 March 1996)] Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI - Application of deep x-ray lithography for fabrication of polymer regular membranes with submicrometer pores

Kulipanov, G. N., Makarov, Oleg A., Mezentseva, Lubov A., Mishnev, S. I., Nazmov, Vladimir, Pindyurin, Valery F., Skrinsky, A. N., Artamonova, L. D., Cherkov, G. A., Gashtold, V. N., Prokopenko, V. S.

Année:

1996

Langue:

english

Fichier:

PDF, 561 KB

english, 1996

8

SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 10 August 2008)] Advances in X-Ray/EUV Optics and Components III - Numerical simulations of achromatic x-ray lenses

Umbach, Marion, Nazmov, Vladimir, Simon, Markus, Last, Arndt, Saile, Volker, Goto, Shunji, Khounsary, Ali M., Morawe, Christian

Année:

2008

Langue:

english

Fichier:

PDF, 673 KB

english, 2008

9

SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Design and Microfabrication of Novel X-Ray Optics II - Submicron focusing of high-energy x-rays with Ni refractive lenses

Snigirev, Anatoly A., Snigireva, Irina I., Di Michiel, Marco, Honkimaki, Veijo, Grigoriev, Maxim V., Nazmov, Vladimir P., Reznikova, Elena F., Mohr, Jurgen, Saile, Volker, Snigirev, Anatoly A., Mancin

Année:

2004

Langue:

english

Fichier:

PDF, 253 KB

english, 2004

10

Mosaic-like micropillar array for hard x-ray focusing—one-dimensional version

Nazmov, Vladimir, Mohr, Juergen, Simon, Rolf

Journal:

Journal of Micromechanics and Microengineering

Année:

2013

Langue:

english

Fichier:

PDF, 863 KB

english, 2013

11

Large-aperture refractive lenses for momentum-resolved spectroscopy with hard X-rays

Fukui, Hiroshi, Simon, Markus, Nazmov, Vladimir, Mohr, Jürgen, Evans-Lutterodt, Kenneth, Stein, Aaron, Baron, Alfred Q. R.

Journal:

Journal of Synchrotron Radiation

Année:

2013

Langue:

english

Fichier:

PDF, 788 KB

english, 2013

12

[AIP SYNCHROTRON RADIATION INSTRUMENTATION: Ninth International Conference on Synchrotron Radiation Instrumentation - Daegu (Korea) (28 May-2 June 2006)] AIP Conference Proceedings - X-ray Lenses Fabricated by LIGA Technology

Nazmov, Vladimir, Reznikova, Elena, Last, Arndt, Mohr, Jurgen, Saile, Volker, Simon, Rolf, DiMichiel, Marco

Année:

2007

Langue:

english

Fichier:

PDF, 910 KB

english, 2007

13

Transmission hard X-ray microscope with increased view field using planar refractive objectives and condensers made of SU-8 polymer

Reznikova, Elena, Weitkamp, Timm, Nazmov, Vladimir, Simon, Markus, Last, Arndt, Saile, Volker

Journal:

Journal of Physics Conference Series

Année:

2009

Langue:

english

Fichier:

PDF, 826 KB

english, 2009

14

A method of mechanical stabilization of ultra-high-AR microstructures

Nazmov, Vladimir, Reznikova, Elena, Mohr, Juergen, Voigt, Anja

Journal:

Journal of Materials Processing Technology

Année:

2016

Langue:

english

Fichier:

PDF, 3.30 MB

english, 2016

15

SPIE Proceedings [SPIE International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics - Kiev, Ukraine (Thursday 11 May 1995)] International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics - Diffraction optical elements with deep phase profile obtained with the use of x-ray parallel intensive beam

Koronkevich, Voldemar P., Kulipanov, G. N., Makarov, Oleg A., Nazmov, Vladimir, Pindyurin, Valery F., Sinyukov, M. P., Svechnikov, Sergey V., Valakh, Mikhail Y.

Année:

1995

Langue:

english

Fichier:

PDF, 125 KB

english, 1995

16

SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Design and Microfabrication of Novel X-Ray Optics II - Planar sets of cross x-ray refractive lenses from SU-8 polymer

Nazmov, Vladimir P., Reznikova, Elena F., Somogyi, Andrea, Mohr, Jurgen, Saile, Volker, Snigirev, Anatoly A., Mancini, Derrick C.

Année:

2004

Langue:

english

Fichier:

PDF, 1.33 MB

english, 2004

17

SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - Seattle, WA (Sunday 7 July 2002)] Design and Microfabrication of Novel X-Ray Optics - X-ray lens with kinoform refractive profile created by x-ray lithography

Shabel'nikov, Leonid, Nazmov, Vladimir, Pantenburg, Franz J., Mohr, Juergen, Saile, Volker, Yunkin, Vecheslav, Kouznetsov, Sergey, Pindyurin, Valery F., Snigireva, Irina, Snigirev, Anatoly A., Mancini

Année:

2002

Langue:

english

Fichier:

PDF, 617 KB

english, 2002

18

SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Design and Microfabrication of Novel X-Ray Optics II - Near-diffraction limited coherent x-ray focusing using planar refractive lenses made of epoxy SU-8 resist

Snigireva, Irina I., Snigirev, Anatoly A., Mancini, Derrick C., Snigirev, Anatoly A., Drakopoulos, Michael, Kohn, Victor G., Nazmov, Vladimir P., Reznikova, Elena F., Mohr, Jurgen, Saile, Volker

Année:

2004

Langue:

english

Fichier:

PDF, 626 KB

english, 2004

19

SPIE Proceedings [SPIE Optical Systems Design - Glasgow, Scotland, United Kingdom (Monday 1 September 2008)] Optical Design and Engineering III - Achromatic x-ray focusing using diffractive and refractive elements

Umbach, Marion, Mazuray, Laurent, Wartmann, Rolf, Nazmov, Vladimir, Simon, Markus, Wood, Andrew, Tissot, Jean-Luc, Last, Arndt, Saile, Volker, Raynor, Jeffrey M.

Année:

2008

Langue:

english

Fichier:

PDF, 606 KB

english, 2008

20

Large-aperture two-dimensional x-ray refractive mosaic lenses

Nazmov, Vladimir, Reznikova, Elena, Mohr, Juergen, Saile, Volker, Tajiri, Hiroo, Voigt, Anja

Journal:

Année:

2016

Langue:

english

Fichier:

PDF, 492 KB

english, 2016

21

Application of ELN-200 in Deep X-ray Lithography

Nazmov, Vladimir, Goldenberg, Boris

Journal:

Physics Procedia

Année:

2016

Langue:

english

Fichier:

PDF, 360 KB

english, 2016

22

An Inverse Method of Manufacturing a Structured X-ray Screen

Nazmov, Vladimir, Goldenberg, Boris, Lemzyakov, Alexey

Journal:

Physics Procedia

Année:

2016

Langue:

english

Fichier:

PDF, 584 KB

english, 2016